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CVD furnace (SiC、BN)
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
Inquiry
- Technical Features
- Related optional configuration
Description
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
Application:SiC coating for C/C composite material, SiC coating for graphite, SiC, BN and ZrC coating for fiber and etc.
Specifications of CVD Furnace
ModelSpec | Working Zone Size (W × H × L) (mm) | Max. Temperature (°C) | Temperature Uniformity (°C) | Ultimate Vacuum (Pa) | Pressure Increase Rate (Pa/h) |
HCVD-060609-SiC | 600 × 600 × 900 | 1500 | ±7.5 | 1-100 | 0.67 |
HCVD-101015-SiC | 1000 × 1000 × 1500 | 1500 | ±7.5 | 1-100 | 0.67 |
HCVD-121220-SiC | 1200×1200×2000 | 1500 | ±10 | 1-100 | 0.67 |
HCVD-151530-SiC | 1500×1500×3000 | 1500 | ±10 | 1-100 | 0.67 |
HCVD-252035-SiC | 2500×2000×3500 | 1500 | ±10 | 1-100 | 0.67 |
VCVD-0305-SiC | φ300×500 | 1500 | ±5 | 1-100 | 0.67 |
VCVD-0608-SiC | φ600×800 | 1500 | ±7.5 | 1-100 | 0.67 |
VCVD-0812-SiC | φ800×1200 | 1500 | ±7.5 | 1-100 | 0.67 |
VCVD-1120-SiC | φ1100×2000 | 1500 | ±10 | 1-100 | 0.67 |
VCVD-2632-SiC | φ2600×3200 | 1500 | ±10 | 1-100 | 0.67 |
The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements. |
Technical Features
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;
2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;
4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;
5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.
Optional Configuration of CVD Furnace
1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Process gas system: volume/mass flow-meter
6.Thermocouple: K type/N type/C type/S type