CVD furnace (SiC、BN)

Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
Inquiry

INQUIRY

Technical Features
Related optional configuration

Description
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.

Application:SiC coating for C/C composite material, SiC coating for graphite, SiC, BN and ZrC coating for fiber and etc.

Specifications of CVD Furnace

ModelSpec	Working Zone Size (W × H × L) (mm)	Max. Temperature (°C)	Temperature Uniformity (°C)	Ultimate Vacuum (Pa)	Pressure Increase Rate (Pa/h)
HCVD-060609-SiC	600 × 600 × 900	1500	±7.5	1-100	0.67
HCVD-101015-SiC	1000 × 1000 × 1500	1500	±7.5	1-100	0.67
HCVD-121220-SiC	1200×1200×2000	1500	±10	1-100	0.67
HCVD-151530-SiC	1500×1500×3000	1500	±10	1-100	0.67
HCVD-252035-SiC	2500×2000×3500	1500	±10	1-100	0.67

VCVD-0305-SiC	φ300×500	1500	±5	1-100	0.67
VCVD-0608-SiC	φ600×800	1500	±7.5	1-100	0.67
VCVD-0812-SiC	φ800×1200	1500	±7.5	1-100	0.67
VCVD-1120-SiC	φ1100×2000	1500	±10	1-100	0.67
VCVD-2632-SiC	φ2600×3200	1500	±10	1-100	0.67
The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Technical Features
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;

2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;

5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.
Optional Configuration of CVD Furnace

1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight

2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5. Process gas system: volume/mass flow-meter

6.Thermocouple: K type/N type/C type/S type