Vacuum Sintering Furnace(SiC/Si3N4/AlN)

The furnace is used for reaction sintering, low pressure sintering, re-crystal sintering of ceramic product, and it can also used for production of ceramic powder. It has both horizontal and vertical structures.

INQUIRY

Technical Features
Related optional configuration

Description
The furnace is used for reaction sintering, low pressure sintering, re-crystal sintering of ceramic product, and it can also used for production of ceramic powder. It has both horizontal and vertical structures.

Application: Ceramic products such as SiC, silicon nitride and aluminum nitride.

Specifications of Vacuum Sintering Furnace

ModelSpec	Working Zone Size (W×H×L) (mm)	Max. Temperature (°C)	Temperature Uniformity (°C)	Ultimate Vacuum (Pa)	Pressure Increase Rate (Pa/h)
HVSF-050511	500×500×1100	1500/2400	±5/±10	1-100	0.67
HVSF-100612	1000×600×1200	1500/2400	±5/±10	1-100	0.67
HVSF-100813	1000×800×1300	1500/2400	±5/±10	1-100	0.67
HVSF-100825	1000×800×2500	1500/2400	±5/±10	1-100	0.67
HVSF-100840	1000×800×4000	1500/2400	±5/±10	1-100	0.67

VVSF-0612	φ600×1200	1500/2400	±5/±10	1-100	0.67
VVSF-0917	φ900×1700	1500/2400	±5/±10	1-100	0.67
VVSF-1015	φ1000×1500	1500/2400	±5/±10	1-100	0.67
VVSF-1120	φ1100×2000	1500/2400	±5/±10	1-100	0.67
The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Technical Features

1.Using unique ACME super high temperature and high current power supply technology, it can long term stable use at high temperature;

2.Using special designed high temperature pyro-meter measuring technology with precision temperature control and small deviation;

3.Installed with special sealing muffle to minimize the silicon vapor and exhaust gas contamination to the heating element and insulation;

4.Installed high efficiency exhaust gas treatment device , which is environment-friendly and convenient to clean;

5.It has debinding system, to complete debinding and sintering process in one furnace at one time.

Optional Configuration of Vacuum Sintering Furnace

1.Furnace door: screw/hydraulic/manual elevation; manual tight/auto lock-ring tight

2.Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3.Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite board/CFC

4.Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5.Process gas system: volume/mass flow-meter; manual/auto valve;

6.Thermocouple: C type/S type/R type/B type

7.Pyro-meter:Dual-color/Single color; CHINO/Raytek