Vacuum Debinding and Sintering Furnace(SiC/Si3N4/AlN)
The furnace is used forreaction sintering, low pressure sintering, re-crystal sintering of carbide, nitride, oxide ceramic embryo and products. The degreasing system is optional to realize the one-time degreasing and sintering treatment of ceramic products.
- Technical Features
- Related optional configuration
The furnace is used for reaction sintering, low pressure sintering, re-crystal sintering of carbide, nitride, oxide ceramic embryo and products. The degreasing system is optional to realize the one-time degreasing and sintering treatment of ceramic products.
Application: Ceramic products such as SiC, silicon nitride and aluminum nitride.
Specifications of Vacuum Debinding and Sintering Furnace
Working Zone Size
|Max. Temperature (°C)||Temperature Uniformity (°C)||Ultimate Vacuum (Pa)||Pressure Increase Rate (Pa/h)|
|The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.|
1.Using unique ACME super high temperature and high current power supply technology, it can long term stable use at high temperature;
2.Using special designed high temperature pyro-meter measuring technology with precision temperature control and small deviation;
3.Installed with special sealing muffle to minimize the silicon vapor and exhaust gas contamination to the heating element and insulation;
4.Installed high efficiency exhaust gas treatment device , which is environment-friendly and convenient to clean;
5.It has debinding system, to complete debinding and sintering process in one furnace at one time.
Optional Configuration of Vacuum Sintering Furnace
1.Furnace door: screw/hydraulic/manual elevation; manual tight/auto lock-ring tight
2.Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3.Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite board/CFC
4.Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5.Process gas system: volume/mass flow-meter; manual/auto valve;
6.Thermocouple: C type/S type/R type/B type
7.Pyro-meter:Dual-color/Single color; CHINO/Raytek