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CVD Furnace(C)

CVD Furnace(C)

Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.

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  • Technical Features
  • Related optional configuration

Description
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) .  It has both horizontal and vertical structures.

Application: C/C composite brake disc, crucible, mold and etc. 

Technical Features
1.  Using multiple temperature control zones, great temperature uniformity;

2.  Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3.  Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4.  It has treatment for the tar, solid dust and organic gases during the deposition process.

Optional Configuration of CVD Furnace

1.  Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight

2.  Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3.  Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC

4.  Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5.  Process gas system: volume/mass flow-meter;

6. Thermocouple: K type/N type/C type/S type

Specifications of CVD Furnace


ModelSpec

Working Zone Size

 (W × H × L) (mm)

Max. Temperature (°C)Temperature Uniformity (°C)Ultimate Vacuum (Pa)Pressure Increase Rate (Pa/h)
HCVD-060609-C600 × 600 × 9001500±7.51-1000.67
HCVD-101015-C1000 × 1000 × 15001500±7.51-1000.67
HCVD-121220-C1200×1200×20001500±101-1000.67
HCVD-151530-C1500×1500×30001500±101-1000.67
HCVD-252035-C2500×2000×35001500±101-1000.67

VCVD-0305-Cφ300×5001500±51-1000.67
VCVD-0608-Cφ600×8001500±7.51-1000.67
VCVD-0812-Cφ800×12001500±7.51-1000.67
VCVD-1120-Cφ1100×20001500±101-1000.67
VCVD-2632-Cφ2600×32001500±101-1000.67
The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.
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Location
ACME Xingsha Industrial Park, East Liangtang Rd. , Changsha City, Hunan
Phone
+86-13469050805(Leo Mobile)
E-Mail
[email protected]
About Us

Founded in 1999, ACME (Advanced Corporation for Materials & Equipments) is located in Muyun Industrial Zone, with an area of 100,000 m2. ACME is a high-tech enterprise specialized in manufacture of industry heating equipment for new material and energy.

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