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CVD Furnace(C)
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
- Technical Features
- Related optional configuration
Description
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
Application:C/C composite brake disc, crucible, mold and etc.
Specifications of CVD Furnace
| Model/Spec | Working Zone Size (W × H × L) (mm) | Max. Temperature (°C) | Temperature Uniformity(°C) | Ultimate Vacuum (Pa) | Pressure Increase Rate(Pa/h) |
| HCVD-060609-C | 600 × 600 × 900 | 1500 | ±7.5 | 1-100 | 0.67 |
| HCVD-101015-C | 1000 × 1000 × 1500 | 1500 | ±7.5 | 1-100 | 0.67 |
| HCVD-121220-C | 1200×1200×2000 | 1500 | ±10 | 1-100 | 0.67 |
| HCVD-151530-C | 1500×1500×3000 | 1500 | ±10 | 1-100 | 0.67 |
| HCVD-152023-C | 1500×2000×2300 | 1500 | ±10 | 1-100 | 0.67 |
| HCVD-252035-C | 2500×2000×3500 | 1500 | ±10 | 1-100 | 0.67 |
| VCVD-0305-C | φ300×500 | 1500 | ±5/±10 | 1-100 | 0.67 |
| VCVD-0608-C | φ600×800 | 1500 | ±7.5/±10 | 1-100 | 0.67 |
| VCVD-0812-C | φ800×1200 | 1500 | ±7.5/±15 | 1-100 | 0.67 |
| VCVD-1120-C | φ1100×2000 | 1500 | ±10/±15 | 1-100 | 0.67 |
| VCVD-1320-C | φ1300×2000 | 1500 | ±10/±15 | 1-100 | 0.67 |
| VCVD-1520-C | φ1500×2000 | 1500 | ±10/±20 | 1-100 | 0.67 |
| VCVD-1822-C | φ1800×2200 | 1500 | ±15 | 1-100 | 0.67 |
| VCVD-2032-C | φ2000×3200 | 1500 | ±15 | 1-100 | 0.67 |
| VCVD-2632-C | φ2600×3200 | 1500 | ±15 | 1-100 | 0.67 |
| VCVD-3338-C | φ3300×3800 | 1500 | ±20 | 1-100 | 0.67 |
| VCVD-3344-C | φ3300×4400 | 1500 | ±20 | 1-100 | 0.67 |
| The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements. | |||||
Technical Features
1. Using multiple temperature control zones, great temperature uniformity;
2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;
4. It has treatment for the tar, solid dust and organic gases during the deposition process
Optional Configuration of CVD Furnace
1. Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Process gas system: volume/mass flow-meter;
6. Thermocouple: K type/N type/C type/S type
