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CVD Furnace(C)

CVD Furnace(C)

Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.

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  • Technical Features
  • Related optional configuration

Description
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) .  It has both horizontal and vertical structures.

Application:C/C composite brake disc, crucible, mold and etc.

Specifications of CVD Furnace

Model/Spec

Working Zone Size

(W × H × L) (mm)

Max. Temperature (°C)

Temperature Uniformity(°C)

Ultimate  Vacuum  (Pa)

Pressure Increase  Rate(Pa/h)

HCVD-060609-C600 × 600 × 9001500±7.51-1000.67
HCVD-101015-C1000 × 1000 × 15001500±7.51-1000.67
HCVD-121220-C1200×1200×20001500±101-1000.67
HCVD-151530-C1500×1500×30001500±101-1000.67
HCVD-152023-C1500×2000×23001500±101-1000.67
HCVD-252035-C2500×2000×35001500±101-1000.67

VCVD-0305-Cφ300×5001500±5/±101-1000.67
VCVD-0608-Cφ600×8001500±7.5/±101-1000.67
VCVD-0812-Cφ800×12001500±7.5/±151-1000.67
VCVD-1120-Cφ1100×20001500±10/±151-1000.67
VCVD-1320-Cφ1300×20001500±10/±151-1000.67
VCVD-1520-Cφ1500×20001500±10/±201-1000.67
VCVD-1822-Cφ1800×22001500±151-1000.67
VCVD-2032-Cφ2000×32001500±151-1000.67
VCVD-2632-Cφ2600×32001500±151-1000.67
VCVD-3338-Cφ3300×38001500±201-1000.67
VCVD-3344-Cφ3300×44001500±201-1000.67
The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Technical Features
1.  Using multiple temperature control zones, great temperature uniformity;

2.  Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3.  Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4.  It has treatment for the tar, solid dust and organic gases during the deposition process

Optional Configuration of CVD Furnace

1.  Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight

2.  Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3.  Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC

4.  Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5.  Process gas system: volume/mass flow-meter;

6. Thermocouple: K type/N type/C type/S type

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Location
ACME Xingsha Industrial Park, East Liangtang Rd. , Changsha City, Hunan
Phone
+86-151 7315 3690( Jessie Mobile)
E-Mail
overseas@sinoacme.cn
About Us

Founded in 1999, ACME (Advanced Corporation for Materials & Equipments) is located in Xingsha Industrial Park, with an area of 100,000 m2. ACME is a high-tech enterprise specialized in manufacture of industry heating equipment for new material and energy.

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