Ileru CVD (SiC, BN)

Ileru ti a lo fun ideri anti-oxidation, iyipada ohun elo matrix ati bẹbẹ lọ nipa lilo orisun gaasi Silicohydride. O ni awọn ẹya petele ati inaro mejeeji.
lorun

lorun

Awọn ẹya Imọ-ẹrọ
Jẹmọ iyan iṣeto ni

Apejuwe
Ileru ti a lo fun ideri anti-oxidation, iyipada ohun elo matrix ati bẹbẹ lọ nipa lilo orisun gaasi Silicohydride. O ni awọn ẹya petele ati inaro mejeeji.

ohun elo:SiC ti a bo fun C / C ohun elo eroja, SiC ti a bo fun graphite, SiC, BN ati ZrC bo fun okun ati be be lo.

Awọn alaye ti CVD Ọra

ModelSpec	Ṣiṣẹ Agbegbe Iwon (W × H × L) (mm)	O pọju. Iwọn otutu (°C)	Isokan iwọn otutu (°C)	Igbale Gbẹhin (Pa)	Iwọn Ilọsi Titẹ (Pa/h)
HCVD-060609-SiC	600 × 600 × 900	1500	± 7.5	1-100	0.67
HCVD-101015-SiC	1000 × 1000 × 1500	1500	± 7.5	1-100	0.67
HCVD-121220-SiC	1200 × 1200 × 2000	1500	± 10	1-100	0.67
HCVD-151530-SiC	1500 × 1500 × 3000	1500	± 10	1-100	0.67
HCVD-252035-SiC	2500 × 2000 × 3500	1500	± 10	1-100	0.67

VCVD-0305-SiC	φ300 × 500	1500	± 5	1-100	0.67
VCVD-0608-SiC	φ600 × 800	1500	± 7.5	1-100	0.67
VCVD-0812-SiC	φ800 × 1200	1500	± 7.5	1-100	0.67
VCVD-1120-SiC	φ1100 × 2000	1500	± 10	1-100	0.67
VCVD-2632-SiC	φ2600 × 3200	1500	± 10	1-100	0.67
Awọn paramita ti o wa loke le ṣe atunṣe si awọn ibeere ilana, wọn kii ṣe bii idiwọn gbigba, alaye alaye. yoo sọ ni imọran imọ-ẹrọ ati awọn adehun.

Awọn ẹya Imọ-ẹrọ
1. Lilo imọ-ẹrọ iṣakoso to ti ni ilọsiwaju julọ, o le ṣe iṣakoso deede ti ṣiṣan MTS ati titẹ, ṣiṣan ti a fi silẹ jẹ iduroṣinṣin ati titẹ titẹ ni ibiti o dín;

2. Iyẹwu idasile pataki ti a ṣe apẹrẹ pẹlu ipa titọ ti o dara ati iṣẹ aiṣedeede nla;

3. Lilo ọpọlọpọ awọn ikanni ifisilẹ pẹlu ṣiṣan gaasi isokan, laisi igun-iku ti o ku ati dada idasile pipe;

4. O ni itọju fun gaasi ibajẹ giga, flammable ati gaasi ibẹjadi, eruku ti o lagbara ati aaye yo kekere awọn ohun elo alalepo lakoko ilana fifi sori ẹrọ;

5. Lilo fifa fifa fifalẹ ipata tuntun ti a ṣe apẹrẹ ti o ni awọn wakati iṣẹ ti o tẹsiwaju gigun ati iwọn itọju kekere.
Iyan iṣeto ni ti CVD Furnace

1. Ilekun ileru: skru / hydraulic / Afowoyi igbega iru; swing šiši / ni afiwe šiši (iwọn ileru nla nla); Afowoyi ju / auto titiipa-oruka ju

2. Ohun elo ileru: gbogbo erogba, irin / Layer Layer alagbara, irin / gbogbo irin alagbara

3. Ileru gbona agbegbe: erogba rirọ / rirọ lẹẹdi ro / rigidi composite ro / CFC

4. Alapapo ano ati muffle: isostatic tẹ lẹẹdi / ga ti nw, agbara ati iwuwo lẹẹdi / itanran iwọn lẹẹdi

5. Ilana gaasi ilana: iwọn didun / ibi-mita sisan

6.Thermocouple: K iru / N iru / C iru / S iru