CVD אויוון (SiC, BN)

Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
אָנפרעג

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טעכניש פֿעיִקייטן
פֿאַרבונדענע אַפּשאַנאַל קאַנפיגיעריישאַן

באַשרייַבונג
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.

אַפּפּליקאַטיאָן:SiC coating for C/C composite material, SiC coating for graphite, SiC, BN and ZrC coating for fiber and etc.

Specifications of CVD Furnace

מאָדעל ספּעק	אַרבעט זאָנע גרייס (W × H × L) (mm)	מאַקס. טעמפּעראַטור (°C)	טעמפּעראַטור וניפאָרמאַטי (°C)	לעצט וואַקוום (פּאַ)	דרוק פאַרגרעסערן קורס (פּאַ/ה)
HCVD-060609-SiC	600 × 600 × 900	1500	± קסנומקס	1-100	0.67
HCVD-101015-SiC	1000 × 1000 × 1500	1500	± קסנומקס	1-100	0.67
HCVD-121220-SiC	קסנומקס × קסנומקס × קסנומקס	1500	± קסנומקס	1-100	0.67
HCVD-151530-SiC	קסנומקס × קסנומקס × קסנומקס	1500	± קסנומקס	1-100	0.67
HCVD-252035-SiC	קסנומקס × קסנומקס × קסנומקס	1500	± קסנומקס	1-100	0.67

VCVD-0305-SiC	×300 × 500	1500	± קסנומקס	1-100	0.67
VCVD-0608-SiC	×600 × 800	1500	± קסנומקס	1-100	0.67
VCVD-0812-SiC	×800 × 1200	1500	± קסנומקס	1-100	0.67
VCVD-1120-SiC	×1100 × 2000	1500	± קסנומקס	1-100	0.67
VCVD-2632-SiC	×2600 × 3200	1500	± קסנומקס	1-100	0.67
די אויבן פּאַראַמעטערס קענען זיין אַדזשאַסטיד צו די פּראָצעס רעקווירעמענץ, זיי זענען נישט ווי אַקסעפּטאַנס נאָרמאַל, די דעטאַל ספּעק. וועט זיין סטייטיד אין די טעכניש פאָרשלאָג און אַגרימאַנץ.

טעכניש פֿעיִקייטן
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;

2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;

5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.
Optional Configuration of CVD Furnace

1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight

2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5. Process gas system: volume/mass flow-meter

6.Thermocouple: K type/N type/C type/S type