Iziko leCVD (SiC, BN)

I-furnace esetyenziselwa ukuxutywa kwe-anti-oxidation, utshintsho lwe-matrix yezinto eziphathekayo kunye nokunye ngokusebenzisa umthombo wegesi ye-Silicohydride. Inezakhiwo ezithe tye nezithe nkqo.
uphando

YOPHANDO

Iimpawu zobugcisa
Uqwalaselo olukhethiweyo olunxulumeneyo

inkcazelo
I-furnace esetyenziselwa ukuxutywa kwe-anti-oxidation, utshintsho lwe-matrix yezinto eziphathekayo kunye nokunye ngokusebenzisa umthombo wegesi ye-Silicohydride. Inezakhiwo ezithe tye nezithe nkqo.

isicelo:I-SiC yokwambathisa ye-C/C yezinto ezihlanganisiweyo, i-SiC yokugquma i-graphite, i-SiC, i-BN kunye ne-ZrC yokugquma i-fiber kunye nokunye.

Ukucaciswa kwe I-CVD Ifanitshala

ImodeliSpec	Ubungakanani boMmandla wokuSebenza (W × H × L) (mm)	Max. Ubushushu (°C)	Ubushushu obufanayo (°C)	Ivacuum yokugqibela (Pa)	Iqondo lokuNyusa uxinzelelo (Pa/h)
HCVD-060609-SiC	I-600 × 600 × 900	1500	± 7.5	1-100	0.67
HCVD-101015-SiC	I-1000 × 1000 × 1500	1500	± 7.5	1-100	0.67
HCVD-121220-SiC	1200 × 1200 × 2000	1500	± 10	1-100	0.67
HCVD-151530-SiC	1500 × 1500 × 3000	1500	± 10	1-100	0.67
HCVD-252035-SiC	2500 × 2000 × 3500	1500	± 10	1-100	0.67

VCVD-0305-SiC	×300 × 500	1500	± 5	1-100	0.67
VCVD-0608-SiC	×600 × 800	1500	± 7.5	1-100	0.67
VCVD-0812-SiC	×800 × 1200	1500	± 7.5	1-100	0.67
VCVD-1120-SiC	×1100 × 2000	1500	± 10	1-100	0.67
VCVD-2632-SiC	×2600 × 3200	1500	± 10	1-100	0.67
Ezi parameters zingasentla zinokuhlengahlengiswa kwiimfuno zenkqubo, azikho njengomgangatho wokwamkelwa, inkcazo yeenkcukacha. iya kuchazwa kwisindululo sobugcisa kunye nezivumelwano.

Iimpawu zobugcisa
1. Ukusebenzisa iteknoloji yolawulo oluphezulu kakhulu, inokulawula ngokuchanekileyo ukuhamba kwe-MTS kunye noxinzelelo, ukuhamba kwe-deposition kuzinzile kwaye uxinzelelo luguquguquka kuluhlu oluncinci;

2. Igumbi lokubekwa elikhethekileyo elenzelwe ngokukhethekileyo elinesiphumo esihle sokutywinwa kunye nokusebenza okukhulu kokuchasana nokungcoliseka;

3. Ukusebenzisa iziteshi ezininzi zokubeka kunye nokuhamba kwegesi efanayo, ngaphandle kwe-deposition kwikona efile kunye nomgangatho ogqibeleleyo wokubeka;

4. Inonyango lwerhasi etyiwayo ephezulu, irhasi enokutsha kunye nesiqhushumbisi, uthuli oluqinileyo kunye neendawo ezincangathi zokunyibilika ezisezantsi ngexesha lenkqubo yokubeka;

5. Ukusebenzisa impompo yokufunxa esanda kuyilwa ekwazi ukumelana nokudleka eneeyure ezininzi zokusebenza eziqhubekayo kunye nesantya esiphantsi solondolozo.
Uqwalaselo oluKhethayo lweCVD Furnace

1. Ucango lwesithando somlilo: isikrufu/i-hydraulic/i-manual yokuphakama uhlobo;ukuvula ujingi/ukuvula ngokunxuseneyo (umnyango omkhulu wesithando somlilo); i-manual tight/ i-auto lock-ring tight

2. Isitya somlilo: yonke i-carbon steel / i-inner layer insimbi engenasici / yonke insimbi engenasici

3. Indawo eshushu yeziko: ikhabhoni ethambileyo evakalayo/ivayiwe yegraphite ethambileyo/ivakeleyo edityanisiweyo edityanisiweyo/CFC

4. Into yokufudumeza kunye ne-muffle: isostatic press graphite / high purity, amandla kunye noxinano lwegraphite / ubungakanani obuhle begraphite

5. Inkqubo yegesi yenkqubo: umthamo / umthamo-imitha yokuhamba

6.Thermocouple: K uhlobo/N uhlobo/C uhlobo/S uhlobo