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Ana Sayfa>Ürünler>C&SiC Kompozitler Endüstriyel Isıtma Ekipmanları

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+86-13469050805( Leo Mobil)

[email protected]|[email protected]

ACME Xingsha Endüstri Parkı, Doğu Liangtang Rd. , Changsha City, Hunan|220012, Minsk, ul. Kalinin 7B

CVD fırını (SiC、BN)

CVD fırını (SiC、BN)

Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
Sorgula

SORGULAMA
  • Teknik özellikler
  • İlgili isteğe bağlı yapılandırma

Açıklama
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.

Uygulama: SiC coating for C/C composite material, SiC coating for graphite, SiC,  BN and ZrC coating for fiber and etc.

Teknik özellikler
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;

2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;

5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.

Optional Configuration of CVD Furnace

1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight

2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5. Process gas system: volume/mass flow-meter

6.Thermocouple: K type/N type/C type/S type

Specifications of CVD Furnace


ModelÖzelliği

Çalışma Bölgesi Boyutu

 (G × Y × U) (mm)

Maks. Sıcaklık (°C)Sıcaklık Tekdüzeliği (°C)Nihai Vakum (Pa)Basınç Artış Oranı (Pa/h)
HCVD-060609-SiC600 × 600 × 9001500± 7.51-1000.67
HCVD-101015-SiC1000 × 1000 × 15001500± 7.51-1000.67
HCVD-121220-SiC1200 × × 1200 20001500± 101-1000.67
HCVD-151530-SiC1500 × × 1500 30001500± 101-1000.67
HCVD-252035-SiC
2500 × × 2000 35001500± 101-1000.67

VCVD-0305-SiCφ300 × 5001500± 51-1000.67
VCVD-0608-SiCφ600 × 8001500± 7.51-1000.67
VCVD-0812-SiCφ800 × 12001500± 7.51-1000.67
VCVD-1120-SiCφ1100 × 20001500± 101-1000.67
VCVD-2632-SiCφ2600 × 32001500± 101-1000.67
Yukarıdaki parametreler proses gereksinimlerine göre ayarlanabilir, bunlar kabul standardı, detay spesifikasyonu değildir. teknik teklif ve anlaşmalarda belirtilecektir.
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İlgili Ürünler


Konum
ACME Xingsha Endüstri Parkı, Doğu Liangtang Rd. , Changsha City, Hunan|220012, Minsk, ul. Kalinin 7B
Telefon
+86-13469050805(Leo Mobil)
E-Posta
[email protected]
Hakkımızda

1999 yılında kurulan ACME (Advanced Corporation for Materials & Equipments), Muyun Sanayi Bölgesi'nde 100,000 m2 alana sahiptir. ACME, yeni malzeme ve enerji için endüstriyel ısıtma ekipmanı üretiminde uzmanlaşmış bir yüksek teknoloji kuruluşudur.

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