Forn CVD (SiC、BN)

Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
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Karatteristiċi tekniċi
Konfigurazzjoni fakultattiva relatata

deskrizzjoni
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.

Applikazzjoni:SiC coating for C/C composite material, SiC coating for graphite, SiC, BN and ZrC coating for fiber and etc.

Speċifikazzjonijiet tal-forn CVD

ModelSpec	Daqs taż-Żona tax-Xogħol (W × H × L) (mm)	Max. Temperatura (°C)	Uniformità tat-Temperatura (°C)	Vakwu Aħħari (Pa)	Rata ta' Żieda fil-Pressjoni (Pa/h)
HCVD-060609-SiC	600 × 600 × 900	1500	± 7.5	1-100	0.67
HCVD-101015-SiC	1000 × 1000 × 1500	1500	± 7.5	1-100	0.67
HCVD-121220-SiC	1200 × 1200 2000 ×	1500	± 10	1-100	0.67
HCVD-151530-SiC	1500 × 1500 3000 ×	1500	± 10	1-100	0.67
HCVD-252035-SiC	2500 × 2000 3500 ×	1500	± 10	1-100	0.67

VCVD-0305-SiC	φ300 × 500	1500	± 5	1-100	0.67
VCVD-0608-SiC	φ600 × 800	1500	± 7.5	1-100	0.67
VCVD-0812-SiC	φ800 × 1200	1500	± 7.5	1-100	0.67
VCVD-1120-SiC	φ1100 × 2000	1500	± 10	1-100	0.67
VCVD-2632-SiC	φ2600 × 3200	1500	± 10	1-100	0.67
Il-parametri ta 'hawn fuq jistgħu jiġu aġġustati għar-rekwiżiti tal-proċess, mhumiex bħala standard ta' aċċettazzjoni, l-ispeċifikazzjoni tad-dettall. se jkun iddikjarat fil-proposta teknika u l-ftehimiet.

Karatteristiċi tekniċi
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;

2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;

5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.
Konfigurazzjoni mhux obbligatorja tal-forn CVD

1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight

2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5. Process gas system: volume/mass flow-meter

6.Thermocouple: K type/N type/C type/S type