ການຈັດປະເພດ
ຕິດຕໍ່ພວກເຮົາ
+86-151 7315 3690(Jessie Mobile)
ACME Xingsha Industrial Park, East Liangtang Rd. , ເມືອງຊາງຊ່າ, ແຂວງຫູນານ
ເຕົາ CVD (C)
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
- ຄຸນລັກສະນະທາງວິຊາການ
- ການຕັ້ງຄ່າທາງເລືອກທີ່ກ່ຽວຂ້ອງ
ລາຍລະອຽດ
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
ຄໍາຮ້ອງສະຫມັກ:C/C composite brake disc, crucible, mold and etc.
Specifications of CVD Furnace
| Model / Spec | ຂະໜາດພື້ນທີ່ເຮັດວຽກ (W × H × L) (ມມ) | ສູງສຸດ. ອຸນຫະພູມ (°C) | Temperature Uniformity(°C) | Ultimate Vacuum (Pa) | Pressure Increase Rate(Pa/h) |
| HCVD-060609-C | 600 600 × 900 | 1500 | ± 7.5 | 1-100 | 0.67 |
| HCVD-101015-C | 1000 1000 × 1500 | 1500 | ± 7.5 | 1-100 | 0.67 |
| HCVD-121220-C | 1200 × 1200 × 2000 | 1500 | ± 10 | 1-100 | 0.67 |
| HCVD-151530-C | 1500 × 1500 × 3000 | 1500 | ± 10 | 1-100 | 0.67 |
| HCVD-152023-C | 1500 × 2000 × 2300 | 1500 | ± 10 | 1-100 | 0.67 |
| HCVD-252035-C | 2500 × 2000 × 3500 | 1500 | ± 10 | 1-100 | 0.67 |
| VCVD-0305-C | φ300× 500 | 1500 | ±5/± 10 | 1-100 | 0.67 |
| VCVD-0608-C | φ600× 800 | 1500 | ± 7.5/± 10 | 1-100 | 0.67 |
| VCVD-0812-C | φ800× 1200 | 1500 | ± 7.5/± 15 | 1-100 | 0.67 |
| VCVD-1120-C | φ1100× 2000 | 1500 | ± 10/± 15 | 1-100 | 0.67 |
| VCVD-1320-C | φ1300× 2000 | 1500 | ± 10/± 15 | 1-100 | 0.67 |
| VCVD-1520-C | φ1500× 2000 | 1500 | ± 10/± 20 | 1-100 | 0.67 |
| VCVD-1822-C | φ1800× 2200 | 1500 | ± 15 | 1-100 | 0.67 |
| VCVD-2032-C | φ2000× 3200 | 1500 | ± 15 | 1-100 | 0.67 |
| VCVD-2632-C | φ2600× 3200 | 1500 | ± 15 | 1-100 | 0.67 |
| VCVD-3338-C | φ3300× 3800 | 1500 | ± 20 | 1-100 | 0.67 |
| VCVD-3344-C | φ3300× 4400 | 1500 | ± 20 | 1-100 | 0.67 |
| ຕົວກໍານົດການຂ້າງເທິງນີ້ສາມາດໄດ້ຮັບການປັບຕາມຄວາມຕ້ອງການຂະບວນການ, ພວກເຂົາເຈົ້າບໍ່ແມ່ນມາດຕະຖານການຍອມຮັບ, ລາຍລະອຽດ spec. ຈະຖືກລະບຸໄວ້ໃນຂໍ້ສະເຫນີດ້ານວິຊາການແລະຂໍ້ຕົກລົງ. | |||||
ຄຸນລັກສະນະທາງວິຊາການ
1. Using multiple temperature control zones, great temperature uniformity;
2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;
4. It has treatment for the tar, solid dust and organic gases during the deposition process
Optional Configuration of CVD Furnace
1. Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Process gas system: volume/mass flow-meter;
6. Thermocouple: K type/N type/C type/S type
