ចង្រ្កាន CVD (SiC, BN)

Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
ស៊ើបអង្កេត

សាកសួរ

លក្ខណៈបច្ចេកទេស
ការកំណត់រចនាសម្ព័ន្ធស្រេចចិត្តដែលពាក់ព័ន្ធ

ការពិពណ៌នា
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.

កម្មវិធី:SiC coating for C/C composite material, SiC coating for graphite, SiC, BN and ZrC coating for fiber and etc.

Specifications of CVD Furnace

គំរូ	ទំហំតំបន់ធ្វើការ (W × H × L) (មម)	អតិបរមា។ សីតុណ្ហភាព (°C)	ឯកសណ្ឋានសីតុណ្ហភាព (°C)	Ultimate Vacuum (Pa)	អត្រាបង្កើនសម្ពាធ (Pa/h)
HCVD-060609-SiC	១២៣០ × ៩០០ × ២០៥០	1500	± 7.5	1-100	0.67
HCVD-101015-SiC	១២៣០ × ៩០០ × ២០៥០	1500	± 7.5	1-100	0.67
HCVD-121220-SiC	1200 × 1200 × 2000	1500	± 10	1-100	0.67
HCVD-151530-SiC	1500 × 1500 × 3000	1500	± 10	1-100	0.67
HCVD-252035-SiC	2500 × 2000 × 3500	1500	± 10	1-100	0.67

VCVD-0305-SiC	300២២០ × ៣៥០	1500	± 5	1-100	0.67
VCVD-0608-SiC	600២២០ × ៣៥០	1500	± 7.5	1-100	0.67
VCVD-0812-SiC	800២២០ × ៣៥០	1500	± 7.5	1-100	0.67
VCVD-1120-SiC	1100២២០ × ៣៥០	1500	± 10	1-100	0.67
VCVD-2632-SiC	2600២២០ × ៣៥០	1500	± 10	1-100	0.67
ប៉ារ៉ាម៉ែត្រខាងលើអាចត្រូវបានលៃតម្រូវទៅនឹងតម្រូវការដំណើរការ, ពួកគេមិនមែនជាស្តង់ដារទទួលយក, spec លម្អិត។ នឹងត្រូវបានបញ្ជាក់នៅក្នុងសំណើបច្ចេកទេស និងកិច្ចព្រមព្រៀង។

លក្ខណៈបច្ចេកទេស
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;

2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;

5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.
Optional Configuration of CVD Furnace

1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight

2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5. ប្រព័ន្ធឧស្ម័នដំណើរការ: បរិមាណ / ម៉ាស់លំហូរ - ម៉ែត្រ

6.Thermocouple: ប្រភេទ K/N ប្រភេទ/C ប្រភេទ/S ប្រភេទ