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ACME Xingsha Industrial Park, East Liangtang Rd. , Cidade de Changsha, Hunan | 220012, Minsk, ul. Kalinin 7B

Forno CVD (SiC 、 BN)

Forno CVD (SiC 、 BN)

Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
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  • Características Técnicas
  • Configuración opcional relacionada

descrición
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.

aplicación: SiC coating for C/C composite material, SiC coating for graphite, SiC,  BN and ZrC coating for fiber and etc.

Características Técnicas
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;

2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;

5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.

Optional Configuration of CVD Furnace

1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight

2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5. Process gas system: volume/mass flow-meter

6.Thermocouple: K type/N type/C type/S type

Specifications of CVD Furnace


ModelSpec

Tamaño da zona de traballo

 (Ancho × alto × largo) (mm)

Máx. Temperatura (° C)Uniformidade de temperatura (° C)Ultimate Vacuum (Pa)Taxa de aumento de presión (Pa / h)
HCVD-060609-SiC600 × 600 × 9001500± 7.51-1000.67
HCVD-101015-SiC1000 × 1000 × 15001500± 7.51-1000.67
HCVD-121220-SiC1200 × 1200 × 20001500± 101-1000.67
HCVD-151530-SiC1500 × 1500 × 30001500± 101-1000.67
HCVD-252035-SiC
2500 × 2000 × 35001500± 101-1000.67

VCVD-0305-SiC300 × 5001500± 51-1000.67
VCVD-0608-SiC600 × 8001500± 7.51-1000.67
VCVD-0812-SiC800 × 12001500± 7.51-1000.67
VCVD-1120-SiC1100 × 20001500± 101-1000.67
VCVD-2632-SiC2600 × 32001500± 101-1000.67
Os parámetros anteriores pódense axustar aos requisitos do proceso, non son o estándar de aceptación, a especificación detallada. farase constar na proposta técnica e nos acordos.
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localización
ACME Xingsha Industrial Park, East Liangtang Rd. , Cidade de Changsha, Hunan | 220012, Minsk, ul. Kalinin 7B
teléfono
+ 86-13469050805 (Leo Mobile)
E-Mail
[protexido por correo electrónico]
Sobre nós

Fundada en 1999, ACME (Advanced Corporation for Materials & Equipment) está situada na zona industrial de Muyun, cunha superficie de 100,000 m2. ACME é unha empresa de alta tecnoloxía especializada na fabricación de equipos de calefacción industrial para novos materiais e enerxía.

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