clasificación
- Equipo de tratamiento térmico al vacío
- Equipos de calefacción industrial para pulvimetalurgia
- Equipos de calefacción industrial compuestos de C y SiC
- Equipo de fabricación de polvo de atomización
- Nuevo material
- Equipos de Pirólisis Térmica de Residuos Sólidos Orgánicos
- Material de carbono de alta pureza y componente de grafito revestido
Contáctenos
+86-151 7315 3690 (Móvil Jessie)
Parque Industrial ACME Xingsha, East Liangtang Rd. , Ciudad de Changsha, Hunan
Horno CVD (C)
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
- Características técnicas
- Configuración opcional relacionada
Descripción
Furnace is used for material ECV/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
Aplicación:C/C composite brake disc, crucible, mold and etc.
Specifications of CVD Furnace
Modelo / espec. | Tamaño de la zona de trabajo (Ancho × alto × largo) (mm) | Max. Temperatura (° C) | Temperature Uniformity(°C) | Ultimate Vacuum (Pa) | Pressure Increase Rate(Pa/h) |
HCVD-060609-C | × × 600 600 900 | 1500 | ± 7.5 | +1 100 | 0.67 |
HCVD-101015-C | × × 1000 1000 1500 | 1500 | ± 7.5 | +1 100 | 0.67 |
HCVD-121220-C | 1200 1200 × × 2000 | 1500 | ± 10 | +1 100 | 0.67 |
HCVD-151530-C | 1500 1500 × × 3000 | 1500 | ± 10 | +1 100 | 0.67 |
HCVD-152023-C | 1500 2000 × × 2300 | 1500 | ± 10 | +1 100 | 0.67 |
HCVD-252035-C | 2500 2000 × × 3500 | 1500 | ± 10 | +1 100 | 0.67 |
VCVD-0305-C | Φ300 × 500 | 1500 | ± 5 /± 10 | +1 100 | 0.67 |
VCVD-0608-C | Φ600 × 800 | 1500 | ± 7.5/± 10 | +1 100 | 0.67 |
VCVD-0812-C | Φ800 × 1200 | 1500 | ± 7.5/± 15 | +1 100 | 0.67 |
VCVD-1120-C | Φ1100 × 2000 | 1500 | ± 10/± 15 | +1 100 | 0.67 |
VCVD-1320-C | Φ1300 × 2000 | 1500 | ± 10/± 15 | +1 100 | 0.67 |
VCVD-1520-C | Φ1500 × 2000 | 1500 | ± 10/± 20 | +1 100 | 0.67 |
VCVD-1822-C | Φ1800 × 2200 | 1500 | ± 15 | +1 100 | 0.67 |
VCVD-2032-C | Φ2000 × 3200 | 1500 | ± 15 | +1 100 | 0.67 |
VCVD-2632-C | Φ2600 × 3200 | 1500 | ± 15 | +1 100 | 0.67 |
VCVD-3338-C | Φ3300 × 3800 | 1500 | ± 20 | +1 100 | 0.67 |
VCVD-3344-C | Φ3300 × 4400 | 1500 | ± 20 | +1 100 | 0.67 |
Los parámetros anteriores se pueden ajustar a los requisitos del proceso, no son como estándar de aceptación, la especificación detallada. se indicará en la propuesta técnica y los acuerdos. |
Características técnicas
1. Using multiple temperature control zones, great temperature uniformity;
2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;
4. It has treatment for the tar, solid dust and organic gases during the deposition process
Optional Configuration of CVD Furnace
1. Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Process gas system: volume/mass flow-meter;
6. Thermocouple: K type/N type/C type/S type