klasifiko
Kontaktu nin
+86-151 7315 3690( Jessie Mobile)
ACME Xingsha Industria Parko, Orienta Liangtang Rd. , Urbo Ĉangŝa, Hunano
CVD furnace (SiC、BN)
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
enketado
- Teknikaj Trajtoj
- Rilata laŭvola agordo
Priskribo
Furnace used for anti-oxidation coating, matrix material character change and etc. by using Silicohydride gas source. It has both horizontal and vertical structures.
apliko:SiC coating for C/C composite material, SiC coating for graphite, SiC, BN and ZrC coating for fiber and etc.
Specifoj de CVD Forno
ModelSpec | Labora Zono Grandeco (L × H × L) (mm) | Maks. Temperaturo (°C) | Temperaturunuformeco (°C) | Finfina Vakuo (Pa) | Plialtiĝo de Premo (Pa/h) |
HCVD-060609-SiC | 600 × 600 × 900 | 1500 | ± 7.5 | 1-100 | 0.67 |
HCVD-101015-SiC | 1000 × 1000 × 1500 | 1500 | ± 7.5 | 1-100 | 0.67 |
HCVD-121220-SiC | 1200 × 1200 × 2000 | 1500 | ± 10 | 1-100 | 0.67 |
HCVD-151530-SiC | 1500 × 1500 × 3000 | 1500 | ± 10 | 1-100 | 0.67 |
HCVD-252035-SiC | 2500 × 2000 × 3500 | 1500 | ± 10 | 1-100 | 0.67 |
VCVD-0305-SiC | φ300 × 500 | 1500 | ± 5 | 1-100 | 0.67 |
VCVD-0608-SiC | φ600 × 800 | 1500 | ± 7.5 | 1-100 | 0.67 |
VCVD-0812-SiC | φ800 × 1200 | 1500 | ± 7.5 | 1-100 | 0.67 |
VCVD-1120-SiC | φ1100 × 2000 | 1500 | ± 10 | 1-100 | 0.67 |
VCVD-2632-SiC | φ2600 × 3200 | 1500 | ± 10 | 1-100 | 0.67 |
La supraj parametroj povas esti ĝustigitaj al la procezaj postuloj, ili ne estas kiel akcepta normo, la detala spec. estos deklaritaj en la teknika propono kaj interkonsentoj. |
Teknikaj Trajtoj
1. Using the most advanced control technology, it can precise control the MTS flow and pressure, the deposition flow is stable and pressure fluctuate in narrow range;
2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;
4. It has treatment for the high corrosive gas, flammable and explosive gas , solid dust and low melting point sticky materials during the deposition process;
5. Using newly designed corrosion resistant vacuum pump which has long continuous working hours and low maintenance rate.
Optional Configuration of CVD Furnace
1. Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size furnace door); manual tight/ auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Proceza gasa sistemo: volumo/masa flumezurilo
6.Thermocouple: K type/N type/C type/S type