Vacuum Debinding and Sintering Furnace(SiC/Si3N4/AlN)

The furnace is used forreaction sintering, low pressure sintering, re-crystal sintering of carbide, nitride, oxide ceramic embryo and products. The degreasing system is optional to realize the one-time degreasing and sintering treatment of ceramic products.

ONDERSOEK

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Verwante opsionele konfigurasie

Beskrywing
The furnace is used for reaction sintering, low pressure sintering, re-crystal sintering of carbide, nitride, oxide ceramic embryo and products. The degreasing system is optional to realize the one-time degreasing and sintering treatment of ceramic products.

Application: Ceramic products such as SiC, silicon nitride and aluminum nitride.

Specifications of Vacuum Debinding and Sintering Furnace

ModelSpec	Working Zone Size (W×H×L) (mm)	Max. Temperature (°C)	Temperature Uniformity (°C)	Ultimate Vacuum (Pa)	Pressure Increase Rate (Pa/h)
VDSF-050511	500 × 500 × 1100	1500 / 2400	±5/± 10	1-100	0.67
VDSF-100612	1000 × 600 × 1200	1500 / 2400	±5/± 10	1-100	0.67
VDSF-100813	1000 × 800 × 1300	1500 / 2400	±5/± 10	1-100	0.67
VDSF-100825	1000 × 800 × 2500	1500 / 2400	±5/± 10	1-100	0.67
VDSF-100840	1000 × 800 × 4000	1500 / 2400	±5/± 10	1-100	0.67
The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

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1.Using unique ACME super high temperature and high current power supply technology, it can long term stable use at high temperature;

2.Using special designed high temperature pyro-meter measuring technology with precision temperature control and small deviation;

3.Installed with special sealing muffle to minimize the silicon vapor and exhaust gas contamination to the heating element and insulation;

4.Installed high efficiency exhaust gas treatment device , which is environment-friendly and convenient to clean;

5.It has debinding system, to complete debinding and sintering process in one furnace at one time.

Optional Configuration of Vacuum Sintering Furnace

1.Furnace door: screw/hydraulic/manual elevation; manual tight/auto lock-ring tight

2.Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3.Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite board/CFC

4.Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5.Process gas system: volume/mass flow-meter; manual/auto valve;

6.Thermocouple: C type/S type/R type/B type

7.Pyro-meter:Dual-color/Single color; CHINO/Raytek