klassifikasie
Kontak Ons
+86-151 7315 3690( Jessie Mobile)
ACME Xingsha Industrial Park, East Liangtang Rd. , Changsha City, Hunan
CVD oond (C)
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
- tegniese eienskappe
- Verwante opsionele konfigurasie
Beskrywing
Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) . It has both horizontal and vertical structures.
aansoek:C/C composite brake disc, crucible, mold and etc.
Specifications of CVD Furnace
| Model/Spes | Werksone Grootte (W × H × L) (mm) | Maks. Temperatuur (°C) | Temperature Uniformity(°C) | Ultimate Vacuum (Pa) | Pressure Increase Rate(Pa/h) |
| HCVD-060609-C | 600 × 600 × 900 | 1500 | ± 7.5 | 1-100 | 0.67 |
| HCVD-101015-C | 1000 × 1000 × 1500 | 1500 | ± 7.5 | 1-100 | 0.67 |
| HCVD-121220-C | 1200 × 1200 × 2000 | 1500 | ± 10 | 1-100 | 0.67 |
| HCVD-151530-C | 1500 × 1500 × 3000 | 1500 | ± 10 | 1-100 | 0.67 |
| HCVD-152023-C | 1500 × 2000 × 2300 | 1500 | ± 10 | 1-100 | 0.67 |
| HCVD-252035-C | 2500 × 2000 × 3500 | 1500 | ± 10 | 1-100 | 0.67 |
| VCVD-0305-C | ×300 × 500 | 1500 | ±5/± 10 | 1-100 | 0.67 |
| VCVD-0608-C | ×600 × 800 | 1500 | ± 7.5/± 10 | 1-100 | 0.67 |
| VCVD-0812-C | ×800 × 1200 | 1500 | ± 7.5/± 15 | 1-100 | 0.67 |
| VCVD-1120-C | ×1100 × 2000 | 1500 | ± 10/± 15 | 1-100 | 0.67 |
| VCVD-1320-C | ×1300 × 2000 | 1500 | ± 10/± 15 | 1-100 | 0.67 |
| VCVD-1520-C | ×1500 × 2000 | 1500 | ± 10/± 20 | 1-100 | 0.67 |
| VCVD-1822-C | ×1800 × 2200 | 1500 | ± 15 | 1-100 | 0.67 |
| VCVD-2032-C | ×2000 × 3200 | 1500 | ± 15 | 1-100 | 0.67 |
| VCVD-2632-C | ×2600 × 3200 | 1500 | ± 15 | 1-100 | 0.67 |
| VCVD-3338-C | ×3300 × 3800 | 1500 | ± 20 | 1-100 | 0.67 |
| VCVD-3344-C | ×3300 × 4400 | 1500 | ± 20 | 1-100 | 0.67 |
| Bogenoemde parameters kan aangepas word by die prosesvereistes, hulle is nie as aanvaardingstandaard nie, die detailspesifikasie. sal in die tegniese voorstel en ooreenkomste vermeld word. | |||||
tegniese eienskappe
1. Using multiple temperature control zones, great temperature uniformity;
2. Special designed deposition chamber with good sealing effect and great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;
4. It has treatment for the tar, solid dust and organic gases during the deposition process
Optional Configuration of CVD Furnace
1. Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Process gas system: volume/mass flow-meter;
6. Thermocouple: K type/N type/C type/S type
